Fluidix Steam-Powered Deionized (DI) Water Heater System

Fluidix Steam-Powered Deionized (DI) Water Heater System

PRODUCT OVERVIEW

The Fluidix® steam-powered Deionized (DI) water heater system from Heateflex offers the semiconductor industry a low-cost alternative to using electricity to heat large volumes of DI water. We field test all heaters, and verify them for reliability. Moreover, you can expect a long life from these heaters, typically more than 10 years. As proof, many of the original units are still in production!

GREATER THAN 400 MILLION GALLONS OF DI WATER HEATED ANNUALLY, AND COUNTING

Since the first Fluidix system was installed in 1982, this product has heated than 400 million gallons of DI water annually throughout the semiconductor industry. The Fluidix steam-powered heater can truly boast of industry-leading reliability.

ENGINEERED FOR PURITY AND ACCURACY

The PVDF/PFA wetted parts in the Fluidix ensure the highest levels of DI water purity.  Furthermore,  uniform process temperatures are ensured via an operator-controlled PLC/touchscreen interface.

SAFETY FEATURES

The Fluidix heater incorporates a number of safety features.  For example, on the steam side of the system there’s an over-temperature RTD (Resistance Temperature Detector). On the process side of the Fluidix, there are safeties or monitors for over-temperature, process low-pressure, and leak detection.  And, last by not least, this heater includes a pressure relief valve and an auto-isolation feature with a cold bypass.

KEY SPECIFICATIONS

Fluidix models are available in sizes ranging from 500,000 BTU/hour to 3,000,000 BTU/hour, or approximately 200 kW to 800 kW. Heating temperature is 95º C, with a temperature accuracy of +- 0.5º C. Heater flow is 0.5 GPM (1.9 LPM) to 100 GPM (378 LPM).  Steam side pressure is 15 psi, and process side pressure is 68 psi.

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Benefits

  • Ultra-Pure Design
    • PVDF/PFA Wetted Surfaces
  • Low Cost of Ownership
    • Utilizes steam which costs less compared to an electrical heater
  • Precise Temperature Control
    • PLC with Mixing Valve Temperature Control for +/- 0.5º C
  • Reliable Technology
    • Over 30 years of proven technology; providing over 400 million gallons of heated DI water

Features

  • Wetted Surface: PVDF/PFA
  • Sizes: from 500,000-3,000,000 Btu/hr., or approximately 200 kW- 800 kW
  • Temperature: Ambient to 95º C
  • Temperature Accuracy: +/- 0.5º C (contingent on customer’s facilitation)
  • Flow: 0.5 GPM (1.9 LPM) to 100 GPM (378 LPM)
  • Pressure: Steam Side, 15 psi;  Process Side, 68 psi

Safety Features:

  • Steam Side
    • Over Temperature RTD
  • Process Side
    • Over Temperature Protection
    • Pressure Relief Valve
    • Process Low-Pressure Monitor
    • Leak Detection
    • Auto-Isolation with Cold Bypass

Models

ModelGPMDimensions
PC-32731538″L x 38″W x78″H
PC-57602557″L x 57″W x78″H
PC-68103057″L x 57″W x78″H
PC-112174068″L x 68″W x78″H
PC-113505068″L x 68″W x78″H
*Higher Flow Rates Available

Controls

PLC/Touch Screen Control

Options

  • Remote Touch Screen
  • Auto Isolation Contamination Prevention System
  • Ethernet
  • Training

Contact Heateflex at (626) 599-8566 to learn more about other options.