The Fluidix® steam-powered Deionized (DI) water heater system from Heateflex offers the semiconductor industry a low-cost alternative to using electricity to heat large volumes of DI water. We field test all heaters, and verify them for reliability. Moreover, you can expect a long life from these heaters, typically more than 10 years. As proof, many of the original units are still in production!
GREATER THAN 400 MILLION GALLONS OF DI WATER HEATED ANNUALLY, AND COUNTING
Since the first Fluidix system was installed in 1982, this product has heated than 400 million gallons of DI water annually throughout the semiconductor industry. The Fluidix steam-powered heater can truly boast of industry-leading reliability.
ENGINEERED FOR PURITY AND ACCURACY
The PVDF/PFA wetted parts in the Fluidix ensure the highest levels of DI water purity. Furthermore, uniform process temperatures are ensured via an operator-controlled PLC/touchscreen interface.
The Fluidix heater incorporates a number of safety features. For example, on the steam side of the system there’s an over-temperature RTD (Resistance Temperature Detector). On the process side of the Fluidix, there are safeties or monitors for over-temperature, process low-pressure, and leak detection. And, last by not least, this heater includes a pressure relief valve and an auto-isolation feature with a cold bypass.
Fluidix models are available in sizes ranging from 500,000 BTU/hour to 3,000,000 BTU/hour, or approximately 200 kW to 800 kW. Heating temperature is 95º C, with a temperature accuracy of +- 0.5º C. Heater flow is 0.5 GPM (1.9 LPM) to 100 GPM (378 LPM). Steam side pressure is 15 psi, and process side pressure is 68 psi.