The new products can be expected to adopt below the 10nm process
Heateflex unveiled two new products for the in-line heating and heating/mixing of liquids at SEMICON Taiwan 2015. The HC in-line heater and heater/mixer fluoropolymer products features a compact design and are engineered to provide superior reliability. As a result, these new products are expected to apply beyond the 10nm process in semiconductor manufacturing.
Jorge Ramirez, President and CEO of Heateflex, said, “More safety sensors are offered by the HC in-line heaters compared to previous versions. Current fabs are fully automated and there are not as many technicians on-site to monitor safety. Our former heaters had been used in 14nm processes whereas the latest ones can be expected to apply to 8nm”.
Heateflex’s new HC in-line heater features special internal fittings that eliminate seals, for increased reliability. It also includes a welded top cap on the heating vessel that removes the need for O-rings, which can lead to possible particle contamination. Heateflex has also introduced an HC in-line heater/mixer product that combines the features and benefits of its in-line heater with a mixing capability. Thus, combining heating and fluids mixing in one compact unit that is ideal for small space configurations.
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