Innovative new HC In-Line Heater from Heateflex Enhances the Cleanliness of the Semiconductor Manufacturing Process

(Microelectronics Magazine)

Synopsis: To meet the critical requirements for cleanliness and reliability in advanced semiconductor manufacturing, Heateflex has unveiled a new in-line heater and heater/mixer in which the input manifold can be rotated 360 degrees. These two products are small, and the all-PFA wetted surface enables the heater to reach temperature set points in the shortest amount of time with a more even heat distribution.
Jorge Ramirez, President and CEO of Heateflex, said the new HC in-line heater and heater/mixer meet the semiconductor industry’s concurrent needs for high reliability and process purity in an extremely compact design.

The new HC in-line heater features special internal fittings that eliminate seals, for increased reliability; and a welded top cap on the heating vessel removes the need for O-rings,which can lead to possible particle contamination. At the core of the heater is the specialized, low-mass Heateflex heating coil with an all-PFA wetted surface. This patented heating element allows for a rapid response to process demands, and its low mass allows the heater to reach temperature set points in the shortest amount of time with a more even heat distribution. The HC in-line heater is available in a variety of sizes and output options, from 2 to 10 kW, and from 120 to 480 voltages.

Additionally, the HC in-line heater/mixer product combines the features and benefits of its in-line heater with a mixing capability, thereby combining heating and fluids mixing in one compact unit that is ideal for small space configurations. Up to three separate fluids at different flow rates can be combined in the mixer, and a combination of internal baffles and the heating element itself provide a uniformly mixed, heated output fluid. The HC heater/mixer’s input manifold can also be rotated 360 degrees, allowing it to fit specific plumbing needs and saving space with vertical or horizontal installation.

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