High Purity Quartz In-Line Fluid Heater

High Purity Quartz In-Line Fluid Heater



The new Heateflex Quartz In-line Fluid heater meets the high-purity heating requirements required in semiconductor manufacturing. This heater uses GE Quartz 214 wetted parts to ensure high purity and chemical compatibility with most process fluids. The heating elements mount directly on the quartz surface, providing an effective heat transfer via conduction. With no lamps to replace and no cooling air required, the cost of ownership for this heater is low. Furthermore, this heater mounts either vertically or horizontally, which allows for flexibility in integrating with existing equipment.


In order to limit heat loss while reducing temperature, this heater features an insulation layer between the vessel and the PVDF housing.  In addition, a power modulator further regulates the heater’s temperature for consistent operation.


The Heateflex Quartz In-Line Fluid heater incorporates some important safety features. For example, redundant safety sensors provide temperature and leak detection. Also, thermal snap switches for both the heater and the housing ensure safe heater operation within the prescribed range. A ground wire also provides protection for both the heater and the operator.


Standard output for this heater is 6.0 kW at 180º C, 208 V, 1 and 3-phase. Other kW outputs are available. Maximum operating pressure is 30 psi.


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  • Low Cost of Ownership
    • No Lamps to Replace and No Cooling Air Required
  • Flexibility with Installation
    • Can be Mounted Horizontally or Vertically
  • Efficient Indirect Heat Transfer
    • Conductive Heating Elements Placed Directly on Quartz Ware


  • Wetted Surface: GE 214 Quartz
  • Output: 6.0 kW Standard (Dependent on Customer Voltage)
  • Voltage: 208 VAC Standard, 1ph & 3ph Available (Other Dependent on Wattage)
  • Housing: PVDF
  • Max Temperature: 180°C (356°F)
  • Max Pressure: 30 PSI

Safety Features:

  • Power Modulator
  • Redundant Safety Sensors
  • Thermal Snap Switches
  • Insulation
  • Ground Wire Protection