Aquarius®II Deionized (DI) Water Heater

Aquarius®II Deionized (DI) Water Heater

The Aquarius® II Deionized (DI) Water Heater is ideal for processes that require significant DI water flow rates, or for processes with on-demand temperature requirements. The system features a dual PID temperature controller, resulting in exceptional temperature control. The Aquarius II’s built-in recirculation system allows for instant hot DI water delivery at temperature, on demand, when needed. This feature negates the need for a trickle flow to keep water at temperature. The innovative recirculation system saves costly DI water which would otherwise go down the drain, and also saves process time



The Aquarius® II heating system delivers hot DI water with precise temperature control through a wide range of flows and on-demand temperature stability. Designed for process recipes with very tight temperature tolerances at highly varying flows of DI water, this unit is perfect for the emerging technologies in single-wafer processing.

  • Ultra-Pure Fluid Path
  • Internal Recirculation System
  • Ease of Installation
  • N2 Not Required
  • Instantaneous Hot DI
  • Reduce Water Usage
  • PLC Temperature Controller with Touch Screen


  • Point-of-Use, One-Pass, Ultra-Pure Deionized Water Heating
  • Fully Integrated Microprocessor Control and Safety System
  • Dual-Digital Readout for All Internal and Output Functions
  • Low Voltage (24 VAC), Operator-Safe Control Panel
  • PVDF and PFA Wetted Surfaces on Hot Deionized Water Side (All PFA Available)
  • 10′ Umbilical Between Heater Box and Control Box
  • Flow Range of 0.5 GPM to 10.0 GPM
  • Models from 30kW to 200kW
  • All Chemraz® O-Rings
  • Fusion-Welded Fittings with Weld Bead Cover (Patent No. 8,349,122)

Safety Interlocks

  • Over-Temperature Safety Interlock On Each Heater
  • Power-to-Flow Control® Safety Interlock
  • Liquid-Level Safety Interlock
  • Minimum-Flow Safety Interlock
  • Process High-Limit Safety Interlock
  • Sensor Failure/Disconnect Safety Interlock
  • Emergency-Off-Button Safety Interlock


Standard Voltages: (380 – 480 VAC, 3 Phase)

Model No. kW Dimensions
(H x W x D)
Incoming Power
Conduit Size
JDI930-1 30 76″ x 24″ x 24″ 1″
JDI960-1 60 76″ x 24″ x 24″ 2″
JDI990-1 90 76″ x 32″ x 24″ 2″
JDI9120-1 120 76″ x 32″ x 24″ 2″
JDI9140-1 140 76″ x 32″ x 24″ 3″
JDI9160-1 160 76″ x 32″ x 24″ 3″
JDI9200-1 200 76″ x 39″ x 24″ 3″

Available options

  • Resistivity Sensor
  • Auto Purge
  • Hot Filtration (PVDF Module with Polysulfone Filter, 0.2 Micron)
  • Enable Remote EMO
  • Ground Fault Circuit Interrupter