Aquarius®II Deionized (DI) Water Heater

Aquarius®II Deionized (DI) Water Heater

The Aquarius® II Deionized (DI) Water Heater is ideal for processes that require significant DI water flow rates, or for processes with on-demand temperature requirements. The system features a dual PID temperature controller, resulting in exceptional temperature control. The Aquarius II’s built-in recirculation system allows for instant hot DI water delivery at temperature, on demand, when needed. This feature negates the need for a trickle flow to keep water at temperature. The innovative recirculation system saves costly DI water which would otherwise go down the drain, and also saves process time

Drawing

Benefits

The Aquarius® II heating system delivers hot DI water with precise temperature control through a wide range of flows and on-demand temperature stability. Designed for process recipes with very tight temperature tolerances at highly varying flows of DI water, this unit is perfect for the emerging technologies in single-wafer processing.

  • Ultra-Pure Fluid Path
  • Internal Recirculation System
  • Ease of Installation
  • N2 Not Required
  • Instantaneous Hot DI
  • Reduce Water Usage
  • PLC Temperature Controller with Touch Screen

Features

  • Point-of-Use, One-Pass, Ultra-Pure Deionized Water Heating
  • Fully Integrated Microprocessor Control and Safety System
  • Dual-Digital Readout for All Internal and Output Functions
  • Low Voltage (24 VAC), Operator-Safe Control Panel
  • PVDF and PFA Wetted Surfaces on Hot Deionized Water Side (All PFA Available)
  • 10′ Umbilical Between Heater Box and Control Box
  • Flow Range of 0.5 GPM to 10.0 GPM
  • Models from 30kW to 200kW
  • All Chemraz® O-Rings
  • Fusion-Welded Fittings with Weld Bead Cover (Patent No. 8,349,122)

Safety Interlocks

  • Over-Temperature Safety Interlock On Each Heater
  • Power-to-Flow Control® Safety Interlock
  • Liquid-Level Safety Interlock
  • Minimum-Flow Safety Interlock
  • Process High-Limit Safety Interlock
  • Sensor Failure/Disconnect Safety Interlock
  • Emergency-Off-Button Safety Interlock

Specifications

Standard Voltages: (380 – 480 VAC, 3 Phase)

Model No. kW Dimensions
(H x W x D)
Incoming Power
Conduit Size
JDI930-1 30 76″ x 24″ x 24″ 1″
JDI960-1 60 76″ x 24″ x 24″ 2″
JDI990-1 90 76″ x 32″ x 24″ 2″
JDI9120-1 120 76″ x 32″ x 24″ 2″
JDI9140-1 140 76″ x 32″ x 24″ 3″
JDI9160-1 160 76″ x 32″ x 24″ 3″
JDI9200-1 200 76″ x 39″ x 24″ 3″

Available options

  • Resistivity Sensor
  • Auto Purge
  • Hot Filtration (PVDF Module with Polysulfone Filter, 0.2 Micron)
  • Enable Remote EMO
  • Ground Fault Circuit Interrupter