Aquarius® Deionized (DI) Water Heater System

Aquarius® Deionized (DI) Water Heater System

The Aquarius® Deionized (DI) Water Heater is the perfect solution for high purity DI water heating applications where accurate temperature control is required. The Aquarius system is engineered to deliver high flows of continuous, at-temperature, hot DI water. The Power-to-Flow Control® feature found in the Aquarius provides one of the most accurate temperature controls available in a DI water heating system, and eliminates undesirable overshoots or drops in temperature. And with models from 40 kW to 225 kW available,  the Aquarius system provides an operational cost savings by reducing the need for multiple heaters.

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  • Ultra-Pure Design
    • PVDF/PFA Wetted Surfaces
  • Enhanced Temperature Stability
    • Programmable Logic Controller with Power to Flow Control® Delivers Constant, Stable, and Accurate Temperature Output
  • User Friendly Touch Screen Interface
    • High Resolution Touch Screen with Graphic User Interface
    • Easy Navigation
  • Built to Meet Industry Safety Guidelines
    • Meets and Exceeds the Stringent Requirements for UL-499, SEMI S2, SEMI S3, and CE
  • Plug and Play system with Complete Integration of Controls
  • Safeties Integrated Into the Design
    • Short Circuit Current Rating at 100kA Amps
    • Ground Fault Circuit Interrupter, Sub-30 mAmp Rating
    • Redundant Safety PLC Monitoring for GFCI, Thermal Cut-Off Sensor, and Hi-Limit Thermocouples
    • NIST-Certified Thermocouples
    • Dual Pressure Relief Valves for Both Input and Output Flows Ensure Rapid Pressure Dissipation
  • Ethernet Read/Write Connection
    • Allows for Heater Data to be Rapidly Transferred to a Fab SECS/GEM System
  • No N₂ Purge Required


  • Heater: Patented Heateflex® Coil
  • Wetted Surface: PVDF/PFA
  • Sizes: 40kW to 225kW (Dependent on Customer Voltage)
  • Voltages: 200VAC to 480VAC 3ph (Dependent on Wattage)
  • Temperature: 95°C (203°F)
  • Temperature Accuracy: ± 0.1°C (Contingent on Customer’s Facilitation)
  • Flow: 0.5GPM (1.9LPM) to 32GPM (122LPM)
  • Pressure: 60PSIG @ 95°C
  • Efficiency: > 99%
  • MTBF: 10.29 years

Safety Features:

  • Liquid Level Sensor
  • Thermal Cut Off
  • Ground Fault Circuit Interrupter
  • Pressure Relief Valves
  • Flow Sensor
  • Redundant Safety PLC


  • Ethernet (Read/Write)
  • Other Communications Available


AquariuskWStandard Modelsw/ Recirculation Option
DI-404078″H x 32″W x 24″D78″H x 24″W x 24″D78″H x 24″W x 24″D78″H x 24″W x 24″D
DI-808078″H x 32″W x 24″D78″H x 24″W x 24″D78″H x 32″W x 24″D78″H x 24″W x 24″D
DI-10010078″H x 39″W x 24″D78″H x 32″W x 24″D78″H x 39″W x 24″D78″H x 32″W x 24″D
DI-12012078″H x 39″W x 24″D78″H x 32″W x 24″D78″H x 39″W x 24″D78″H x 32″W x 24″D
DI-160160N/A78″H x 39″W x 24″DN/A78″H x 39″W x 24″D
DI-200200N/A78″H x 39″W x 24″DN/A78″H x 39″W x 24″D
DI-225225N/A78″H x 39″W x 24″DN/A78″H x 39″W x 24″D
*Low VAC: 200-240 VAC, 3-Phase · High VAC: 380-480 VAC, 3-Phase


Power-To Flow®
Heateflex’s patented Power-To-Flow Control® is an innovative control system designed to provide accurate temperature output in single pass heating applications. Power-To-Flow Control eliminates undesirable overshoots or drops in temperature. The sophisticated Aquarius® temperature control system features multi-loop capability and feed-forward functions to compensate for variations in the process flow rate. It measures the flow rate of fluid as it comes into the heater, measuring the temperature at various stages in the heating process, and then adjusting the proportion of power applied to each heating zone based on these measurements. This advanced integrated control method reacts quickly to any variations in flow, providing a steady supply of DI water at a stable temperature.


  • Excellent Temperature Stability
  • Rapid Response to Temperature & Flow Variations
  • Eliminates Excessive Overshoots & Drops In Temperature


  • Built in Recirculation
  • Fusible Disconnect with Lock Out Tag Out
  • Auto-Purge (Pump Not Included)
  • Resistivity Sensor
  • Leak Alarms (Critical and Non-Critical)
  • Discrete Interface
  • Analog Interface
  • Dry Contact Interface

Contact Heateflex at (626) 599-8566 to learn more about other options.