Heateflex has been a pioneer in the development of ultra-pure heating equipment for the semiconductor market since 1974. We have built a reputation for providing products that meet and exceed stringent industry (SEMI) requirements for safety, quality and performance to enable improved yields in semiconductor manufacturing processes.
Heateflex engineers design products for applications such as DI water heating, fluid and gas heating and heat exchange, filtration, temperature, and liquid level sensing and control that align industry needs with improved material technologies. A recently-completed expansion of cleanroom production facilities ensures compliance with customer expectations as production volumes increase, empowering customers with adaptable temperature control with extreme precision and efficiency.
Aquarius® Deionized (DI) Water Heater System
Fluidix® Steam Driven Deionized (DI) Water Heater System
Poseidon™ Stainless Steel Ultra Pure Fluid Heater System
PVDF/PFA Ultra Pure Fluid In-Line Heaters
PFA Ultra Pure Fluid In-Line Heaters
Vesper™ PVDF/PFA Heat Exchangers
Stainless Steel N2 Heater
Stainless Steel In-Line Fluid Heater
Aries Solvent Heater
PFA Tank Heaters