PROBATH® Quartz Process Baths

Benefits:

• Minimized Contamination with Corrosion and Thermal Shock Resistance
• Structural Support and Fume-Tight Integrity
• Reduces Warm Time and Longer Lasting

These constant temperature controlled baths are contaminant-free and fast heating for use in wet-etch wafer processing applications employing high temperature acids and solvents. These baths are molded of fused quartz (minimum 99.9999% silica) and polished to provide a superior high temperature corrosion-resistant vessel greatly reducing potential for contamination. They are the standard of excellence and reliability for the IC manufacturing industry.

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PROBATH® Quartz Process Baths

Features:

• One Piece Molded Quartz Vessel Constructed for Higher Purity.
• Direct Connection to Heateflex Corporation and Other Controllers.
• Rotomolded PVDF Outer Enclosure. UL Rating 94-V-O.
• Three (3) Over-Temperature Thermodisk Sensors to Prevent the Bath from Overheating.
• Redundant Type J Thermocouples for Temperature Control/Additional Over Temperature Protection.
• PTFE Wiring used Throughout.
• Alumina Silica Refractory Insulation Rated at 1315°C. Used to Keep the Heat in the Bath and Energy Costs Down.

Safety Interlocks to Heater Power:

• Redundant Over-Limit Thermodisks

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PROBATH® Quartz Process Baths

Standard Models:

Model No.	Max Carrier Capacity and Wafer Diameter		Max Vol (Gal)	Heater (kW)*	Inner Tank Dimensions (L x W x D)
MQ-14	1	100mm (4")	1.6	2.2	7.75" x 7.75" x 7.25"
MQ-16	1	150mm (6")	2.6	2.2	7.75" x 7.75" x 10.00"
MQ-18	1	200mm (8")	6.7	4.2	12.00" x 11.00" x 11.75"
MQ-24	2	100mm (4")	2.6	3.0	11.00" x 7.50" x 8.00"
MQ-25	2	125mm (5")	3.9	3.0	13.50" x 7.50" x 9.00"
MQ-25	2	150mm (6")	5.5	4.0	16.00" x 8.00" x 10.00"

* Heaters are 208 VAC, other voltages are available.

Available Options:

• Temperature Controllers
• Drain
• Air Liquid Level Sensor

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PROBATH® Quartz Process Baths

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