PROBATH® Quartz Process Baths
These constant temperature controlled baths are contaminant-free and fast heating for use in wet-etch wafer processing applications employing high temperature acids and solvents. These baths are molded of fused quartz (minimum 99.9999 % silica) and polished to provide a superior high temperature corrosion-resistant vessel greatly reducing potential for contamination. They are the standard of excellence and reliability for the IC manufacturing industry.
- Benefits
- Features
- Specifications
Benefits
- Minimized Contamination with Corrosion and Thermal Shock Resistance
- Structural Support and Fume-Tight Integrity
- Reduces Warm Time and Longer Lasting
Features
- One Piece Molded Quartz Vessel Constructed for Higher Purity.
- Direct Connection to Heateflex Corporation and Other Controllers.
- Rotomolded PVDF Outer Enclosure. UL Rating 94-V-O.
- Three (3) Over-Temperature Thermodisk Sensors to Prevent the Bath from Overheating.
- Redundant Type J Thermocouples for Temperature Control/Additional Over Temperature Protection.
- PTFE Wiring used Throughout.
- Alumina Silica Refractory Insulation Rated at 1315°C. Used to Keep the Heat in the Bath and Energy Costs Down.
Safety Interlocks to Heater Power
- Redundant Over-Limit Thermodisks
Standard Models
Model No. |
Max Carrier Capacity and Wafer Diameter |
Max Vol (Gal) |
Heater (kW)* |
Inner Tank Dimensions | |
MQ-14 | 1 |
100mm (4") | 1.6 |
2.2 | 7.75" x 7.75" x 7.25" |
MQ-16 |
1 |
150mm (6") |
2.6 | 2.2 |
7.75" x 7.75" x 10.00" |
MQ-18 |
1 |
200mm (8") |
6.7 | 4.2 |
12.00" x 11.00" x 11.75" |
MQ-24 |
2 |
100mm (4") |
2.6 | 3.0 |
11.00" x 7.50" x 8.00" |
MQ-25 |
2 |
125mm (5") |
3.9 |
3.0 |
13.50" x 7.50" x 9.00" |
MQ-25 |
2 |
150mm (6") |
5.5 |
4.0 |
16.00" x 8.00" x 10.00" |
Available Options
* Heaters are 208 VAC, other voltages are available.
- Temperature Controllers, Drain, Air Liquid Level Sensor
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