Aquarius II
The Aquarius® II deionized water heating system is ideal if a process has very drastic DI flow rates or there is a requirement for on-demand temperature. The unit uses a dual PID temperature controller to produce some of the best temperature control within the industry. A patent pending, built-in recirculation system allows for instant hot DI at temperature on demand.
- Benefits
- Features
- Specifications
Benefits
The Aquarius® II heating system delivers hot DI water with precise temperature control through a wide range of flows and on-demand temperature stability. Designed for process recipes with very tight temperature tolerances at highly varying flows of DI Water, this unit leads the way to next generation heating. It is the perfect unit for the emerging technologies in single wafer processing.
- Ultra Pure Fluid Path
- Internal Recirculation System
- Ease of Installation
- N2 Not Required
- Instantaneous Hot DI
- Reduce Water Usage
- PLC Temperature Controller with Touch Screen
Meeting Your Process Requirements
The AquariusII® Heating System is engineered to deliver high flows of continuous, at temperature, hot DI water. With models from 30kW to 200kW available. Heateflex offers the flexibility to meet exact flow and temperature process requirements. The large kW systems provide cost savings by reducing the need of multiple heaters.
Features
- Point-of-Use, One Pass, Ultra-Pure Deionized Water Heating
- Fully Integrated Microprocessor Control and Safety System
- Dual-Digital Readout for All Internal and Output Functions
- Low Voltage (24 VAC), Operator Safe Control Panel
- PVDF and PFA Wetted Surfaces on Hot Deionized Water Side - (All PFA Available)
- 10' Umbilical Between Heater Box and Control Box
- Flow Range of 0.5 GPM to 10.0 GPM
- Models from 30kW to 200kW
- All Chemraz® O-Rings
- Patent No. 8,349,122
Safety Interlocks to Heater Power
- Over-Temperature Safety Interlock On Each Heater
- Power-To-Flow Control® Safety Interlock
- Liquid Level Safety Interlock
- Minimum Flow Safety Interlock
- Process High Limit Safety Interlock
- Sensor Failure/Disconnect Safety Interlock
- Emergency-Off Button Safety Interlock
Standard Voltages: (380 – 480 VAC, 3 Phase)
Model No |
kW |
Dimensions |
Incoming Power |
JDI930-1 |
30 |
76" x 24" x 24" |
1" |
JDI960-1 |
60 |
76" x 24" x 24" |
2" |
JDI990-1 |
90 |
76" x 32" x 24" |
2" |
JDI9120-1 |
120 |
76" x 32" x 24" |
2" |
JDI9140-1 |
140 |
76" x 32" x 24" |
3" |
JDI9160-1 |
160 |
76" x 32" x 24" |
3" |
JDI9200-1 |
200 |
76" x 39" x 24" |
3" |
Available Options
- Resistivity Sensor
- Auto Purge
- Hot Filtration (PVDF Module with Polysulfone Filter, 0.2 Micron)
- Enable Remote EMO
- Ground Fault Circuit Interrupter
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